Iranian Journal of Mechanical Engineering Transactions of ISME

Iranian Journal of Mechanical Engineering Transactions of ISME

Effects of high-power high-frequency acoustic noise on the performance of MEMS vibratory gyroscopes

Authors
hasan mohammadkhani 1
Hemad Keshavarzpour 2
1 Department of Aerospace Engineering, Imam Hossein University
2 PhD.
10.30506/ijmep.2021.117635.1657
Abstract
In the present article, the effects of high-power high-frequency acoustic noise on the dynamical response and fidelity of the sensing signal of the MEMS vibratory gyroscopes are investigated. At first, differential equations of motion the system with four degrees of freedom by considering the frame of the gyroscope are derived and rewritten in state-space form. In these equations, the interaction of the acoustic noise with the gyroscope is modeled as a mechanical force. Then, a Simulink model of the MEMS vibratory gyroscope dynamics is established and the effects of harmonic and random high-power high-frequency acoustic noises on the performance of gyroscope are studied. Influences of different parameters such as harmonic noise frequency, sound pressure level and quality factor of the gyroscope are explored. Numerical simulation results show the proximity of the noise frequency to the resonance of the gyroscope as well as pressure level deteriorate the sensing signal while the quality factor of the system rejects noise effects.
Keywords
Acoustic field
Navigation sensors
high-frequency waves
MEMS gyroscope
white noise

Subjects

[1] Patel, C., and McCluskey, P., “Performance of MEMS Vibratory Gyroscopes in Harsh Environments”, 8th International Conference and Exhibition on Device Packaging, Chicago, USA, pp. 633-654, (2012).
[2] Yoon, S.W., Lee, S.W., and Najafi, Kh., “Vibration-induced Errors in MEMS Tuning Fork Gyroscopes”, Sensors Actuators A: Physical, Vol. 180, pp. 32-44, (2012).
[3] Yoon, S.W., Lee S.W., Perkins N.C., and Najafi, K., “Vibration Sensitivity of MEMS Tuning Fork Gyroscopes”, Proceedings of IEEE Sensors, Atlanta, USA, pp. 115-119, (2007).
[4] Hyvönen, H., “Thermomechanical and Mechanical Characterization of a 3-Axial MEMS Gyroscope”, Aalto University, Helsinky, Finland, (2011).
[5] Patel, C., and McCluskey, P., “Performance Degradation of the MEMS Vibratory Gyroscope in Harsh Environments”, ASME 2011 International Mechanical Engineering Congress and Exposition, Colorado, USA, pp. 511-515, (2011).
[6] Choa, S. H., “Reliability of Vacuum Packaged MEMS Gyroscopes”, in Microelectronics Reliability, Vol. 45, pp. 361-369, (2005).
[7] Weinberg, M.S., and Kourepenis, A., “Error Sources in In-plane Silicon Tuning-fork MEMS Gyroscopes”, Journal of Microelectromechanical System, Vol. 15, pp. 479-491, (2006).
[8] Dean R., Flowers G., Hodel S., MacAllister K. and Horvath R., “Vibration Isolation of MEMS Sensors for Aerospace Applications”, Proceedings of the SPIE Proceedings Series; SPIE: Bellingham, WA, USA, pp. 166-170, (2002).
[9] Dean, R., Flowers, G., Sanders, N., MacAllister, K., Horvath, R., Hodel, A. S., Johnson, W., Kranz, M., and Whitley, M., “Damping Control of Micromachined Lowpass Mechanical Vibration Isolation Filters using Electrostatic Actuation with Electronic Signal Processing”, Proceedings of the SPIE International Symposia on Smart Structures and Materials, SPIE, San Diego, USA, pp. 11-22, (2005).
[10] Dean, R.N., Flowers, G.T., Hodel, A.S., Roth, G., Castro, S., Zhou, R., Moreira, A., Ahmed, A., Rifki, R., and Grantham, B. E., “On the Degradation of MEMS Gyroscope Performance in the Presence of High Power Acoustic Noise”, IEEE International Symposium on Industrial Electronics, Vigo, Spain, pp. 1435-1440, (2007).
[11] Castro, S., Dean, R., Roth, G., Flowers, G. T., and Grantham, B., “Influence of Acoustic Noise on the Dynamic Performance of MEMS Gyroscopes”, Mechanical Systems and Control, Vol. 9, pp. 1825-1831, (2007).
[12] Soobramaney, P., Flowers, G., and Dean, R., “Mitigation of the Effects of High Levels of  High-frequency Noise on MEMS Gyroscopes using Microfibrous Cloth”, Proceedings of the ASME Design Engineering Technical Conference, Boston, USA, pp. 2-5, (2015).
[13] Rao, S.S., "Mechanical Vibrations", 5th Edition, Pearson-Prentice Hall, Upper Saddle River, (2011).
[14] Müller, G., and Möser, M., "Handbook of Engineering Acoustics", Springer, Berlin/ Heidelberg, Germany, (2013). 

  • Receive Date 27 November 2019
  • Revise Date 20 October 2020
  • Accept Date 14 February 2022